Extremely low density self-assembled InAs quantum dots are grown by a combination technique of in situ annealing for 2 min and pause of substrate rotation during molecular beam epitaxy. The surface morphology and structural characteristics of the quantum dots are scrutinized by atomic force microscopy and photoluminescence spectra. It is found that the quantum dot size and density increase as the InAs deposition amount rises. Quantum dots with a density between 2.5 10 cmand 2.2 10 cm are 2–5 nm in height and 18–39 nm in diameter. It is believed that as-grown InAs nanodots may be of important value for future single quantum dot research.
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